1/15/2010	7:37:48 AM	Main Vac valve opened
1/15/2010	7:37:49 AM	Main Vac valve closed
1/15/2010	7:37:55 AM	Main Vac valve opened
1/15/2010	7:37:56 AM	Main Vac valve closed
1/15/2010	7:37:58 AM	Main Vac valve opened
1/15/2010	7:37:59 AM	Main Vac valve closed
1/15/2010	7:51:44 AM	Bypass valve opened
1/15/2010	7:51:44 AM	Bypass valve closed
1/15/2010	7:52:27 AM	Bypass solenoid MFC set to  0.000000
1/15/2010	7:52:28 AM	Bypass valve opened
1/15/2010	7:52:49 AM	Main Vac valve opened
1/15/2010	7:55:41 AM	Bypass valve closed
1/15/2010	7:55:42 AM	Main Vac valve closed
1/15/2010	7:55:56 AM	Main Vac valve opened
1/15/2010	7:55:57 AM	Bypass valve opened
1/15/2010	7:56:31 AM	Bypass valve closed
1/15/2010	7:56:32 AM	Main Vac valve closed
1/15/2010	7:57:35 AM	Bypass valve opened
1/15/2010	7:58:15 AM	Main Vac valve opened
1/15/2010	7:58:34 AM	Helium MFC set to  100.000000
1/15/2010	7:58:37 AM	Helium valve opened
1/15/2010	8:00:41 AM	Helium valve closed
1/15/2010	8:01:53 AM	Main Vac valve closed
1/15/2010	8:02:04 AM	Helium valve opened
1/15/2010	8:12:48 AM	Helium valve closed
1/15/2010	8:12:51 AM	Main Vac valve opened
1/15/2010	8:16:06 AM	Main Vac valve closed
1/15/2010	8:16:06 AM	Bypass valve closed
1/15/2010	8:16:18 AM	Main Vac valve opened
1/15/2010	8:16:19 AM	Bypass valve opened
1/15/2010	8:16:20 AM	Bypass valve closed
1/15/2010	8:16:21 AM	Main Vac valve closed
1/15/2010	8:16:29 AM	Bypass valve opened
1/15/2010	8:16:30 AM	Main Vac valve opened
1/15/2010	8:30:29 AM	Bypass valve closed
1/15/2010	8:30:30 AM	Main Vac valve closed
1/15/2010	8:30:38 AM	Bypass valve opened
1/15/2010	8:30:39 AM	Main Vac valve opened
1/15/2010	8:33:17 AM	Bypass solenoid MFC set to  760.000000
1/15/2010	8:33:21 AM	Helium MFC set to  100.000000
1/15/2010	8:33:24 AM	Helium valve opened
1/15/2010	8:33:28 AM	Main Vac valve closed
1/15/2010	8:33:39 AM	Helium MFC set to  500.000000
1/15/2010	8:35:11 AM	Bypass valve closed
1/15/2010	8:35:13 AM	Bubbler valve opened
1/15/2010	8:35:19 AM	Bubbler valve closed
1/15/2010	8:35:20 AM	Bypass valve opened
1/15/2010	8:35:42 AM	Bypass valve closed
1/15/2010	8:35:45 AM	Bubbler valve opened
1/15/2010	8:36:33 AM	Bubbler valve closed
1/15/2010	8:36:34 AM	Bypass valve opened
1/15/2010	8:36:41 AM	Helium valve closed
1/15/2010	8:36:46 AM	Bypass solenoid MFC set to  0.000000
1/15/2010	8:37:09 AM	Main Vac valve opened
1/15/2010	9:23:57 AM	Bypass valve closed
1/15/2010	9:23:58 AM	Main Vac valve closed
1/15/2010	9:24:06 AM	Bypass valve opened
1/15/2010	9:24:07 AM	Main Vac valve opened
1/15/2010	9:32:56 AM	Main Vac valve closed
1/15/2010	9:32:58 AM	Bypass valve closed
1/15/2010	9:33:02 AM	Bypass valve opened
1/15/2010	9:33:08 AM	Bypass solenoid MFC set to  760.000000
1/15/2010	9:33:10 AM	Helium valve opened
1/15/2010	9:34:41 AM	Bypass valve closed
1/15/2010	9:34:44 AM	Bubbler valve opened
1/15/2010	9:34:48 AM	Bubbler valve closed
1/15/2010	9:34:49 AM	Bypass valve opened
1/15/2010	9:34:54 AM	Bypass valve closed
1/15/2010	9:34:58 AM	Bubbler valve opened
1/15/2010	9:35:01 AM	Bubbler valve closed
1/15/2010	9:35:02 AM	Bypass valve opened
1/15/2010	9:35:12 AM	Bypass valve closed
1/15/2010	9:35:13 AM	Bubbler valve opened
1/15/2010	9:35:43 AM	Bubbler valve closed
1/15/2010	9:35:43 AM	Bypass valve opened
1/15/2010	9:35:47 AM	Helium valve closed
1/15/2010	9:35:52 AM	Bypass solenoid MFC set to  0.000000
1/15/2010	9:36:18 AM	Main Vac valve opened
1/15/2010	9:43:18 AM	Main Vac valve closed
1/15/2010	9:43:24 AM	Bypass solenoid MFC set to  760.000000
1/15/2010	9:43:29 AM	Helium valve opened
1/15/2010	9:44:58 AM	Bypass valve closed
1/15/2010	9:45:00 AM	Bubbler valve opened
1/15/2010	9:46:26 AM	Bubbler valve closed
1/15/2010	9:46:27 AM	Bypass valve opened
1/15/2010	9:46:29 AM	Helium valve closed
1/15/2010	9:46:33 AM	Bypass solenoid MFC set to  0.000000
1/15/2010	9:46:54 AM	Main Vac valve opened
1/15/2010	11:45:53 AM	Bypass valve closed
1/15/2010	11:45:53 AM	Main Vac valve closed
1/15/2010	11:46:05 AM	Bypass valve opened
1/15/2010	11:46:06 AM	Main Vac valve opened
1/15/2010	11:46:18 AM	Bypass solenoid MFC set to  760.000000
1/15/2010	11:46:22 AM	Main Vac valve closed
1/15/2010	11:46:24 AM	Helium valve opened
1/15/2010	11:47:57 AM	Bypass valve closed
1/15/2010	11:47:59 AM	Bubbler valve opened
1/15/2010	12:38:07 PM	Bubbler valve closed
1/15/2010	12:38:08 PM	Helium valve closed
1/15/2010	12:38:10 PM	Bypass valve opened
1/15/2010	12:38:14 PM	Bypass solenoid MFC set to  0.000000
1/15/2010	12:39:05 PM	Main Vac valve opened
1/15/2010	12:59:39 PM	Main Vac valve closed
1/15/2010	12:59:40 PM	Bypass valve closed
1/15/2010	12:59:49 PM	Bypass valve opened
1/15/2010	12:59:50 PM	Main Vac valve opened
1/15/2010	1:08:21 PM	Program started after a nonstandard shutdown
1/15/2010	1:08:23 PM	Bypass valve opened
1/15/2010	1:08:23 PM	Main Vac valve opened
1/15/2010	1:08:49 PM	Bypass valve closed
1/15/2010	1:08:50 PM	Bypass valve opened
1/15/2010	1:08:59 PM	Helium MFC set to  500.000000
1/15/2010	1:09:15 PM	H2 MFC set to  0.000000
1/15/2010	1:12:32 PM	Bypass valve closed
1/15/2010	1:12:33 PM	Main Vac valve closed
1/15/2010	1:12:41 PM	Bypass valve opened
1/15/2010	1:12:42 PM	Main Vac valve opened
1/15/2010	1:14:27 PM	Bypass solenoid MFC set to  760.000000
1/15/2010	1:14:41 PM	Main Vac valve closed
1/15/2010	1:14:55 PM	Helium valve opened
1/15/2010	1:15:13 PM	Bypass valve closed
1/15/2010	1:15:17 PM	Bypass valve opened
1/15/2010	1:16:43 PM	Helium valve closed
1/15/2010	1:16:44 PM	Bypass valve closed
1/15/2010	1:27:40 PM	Bypass valve opened
1/15/2010	1:27:42 PM	Bypass valve closed
1/15/2010	1:37:56 PM	Bypass solenoid MFC set to  0.000000
1/15/2010	1:38:36 PM	Bypass valve opened
1/15/2010	1:39:08 PM	Main Vac valve opened
1/15/2010	1:40:37 PM	Bypass valve closed
1/15/2010	1:40:37 PM	Main Vac valve closed
1/15/2010	1:40:46 PM	Bypass valve opened
1/15/2010	1:40:47 PM	Main Vac valve opened
1/15/2010	1:41:01 PM	Helium valve opened
1/15/2010	1:42:55 PM	Helium valve closed
1/15/2010	1:43:47 PM	Bypass valve closed
1/15/2010	1:43:48 PM	Main Vac valve closed
1/15/2010	1:44:02 PM	Bypass valve opened
1/15/2010	1:44:03 PM	Main Vac valve opened
1/15/2010	1:46:36 PM	Bypass solenoid MFC set to  760.000000
1/15/2010	1:46:38 PM	Main Vac valve closed
1/15/2010	1:46:46 PM	H2 valve opened
1/15/2010	1:49:55 PM	Bypass valve closed
1/15/2010	1:49:58 PM	Bubbler valve opened
1/15/2010	2:12:18 PM	SiCl4 pre valve opened
1/15/2010	2:12:20 PM	SiCl4 post valve opened
1/15/2010	2:32:49 PM	SiCl4 post valve closed
1/15/2010	2:32:49 PM	SiCl4 pre valve closed
1/15/2010	3:01:19 PM	H2 valve closed
1/15/2010	3:01:20 PM	H2 valve opened
1/15/2010	3:01:51 PM	Bypass solenoid MFC set to  760.000000
1/15/2010	3:01:57 PM	Helium MFC set to  500.000000
1/15/2010	3:12:33 PM	Helium valve opened
1/15/2010	3:12:37 PM	H2 valve closed
1/15/2010	3:14:55 PM	Bubbler valve closed
1/15/2010	3:14:57 PM	Helium valve closed
1/15/2010	3:19:03 PM	Bypass solenoid MFC set to  0.000000
1/15/2010	3:19:11 PM	Bypass valve opened
1/15/2010	3:19:54 PM	Main Vac valve opened
